Electromagnetic biaxial microscanner with mechanical amplification at resonance
Electromagnetic biaxial microscanner with mechanical amplification at resonance
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DOI：
10.1364/oe.23.016792
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发表时间：
2015-06-29
期刊：
影响因子：
3.8
通讯作者：
Ji, Chang-Hyeon
中科院分区：
文献类型：
--
作者：
Cho, Ah Ran;Han, Aleum;Ji, Chang-Hyeon
我们展示了具有机械放大机制的电磁双轴微扫描仪的设计、制造和测量结果。通过表面和体微机械加工工艺的结合，制造出了具有两种不同单晶硅层厚度和集成铜线圈的万向扫描仪。由永磁体阵列和极片组成的磁体组件已放置在基板下方，以提供与两个垂直扫描轴成 45 度的高强度横向磁场。微镜由额外的万向节支撑以实现机械放大。具有铝反射表面的 1.2mm 直径镜子已在 60Hz 的垂直扫描频率和 21kHz 的水平扫描频率下启动。水平和垂直扫描的最大扫描角度分别为 21.19kHz 时 36.12 度和 60Hz 时 17.62 度。 (C) 2015年美国光学学会
We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45 degrees to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12 degrees at 21.19kHz and 17.62 degrees at 60Hz have been obtained for horizontal and vertical scans, respectively. (C) 2015 Optical Society of America