Ferroelectric properties of (Ba0.5Sr0.5)TiO3/Pb(Zr0.52Ti0.48)O3/ (Ba0.5Sr0.5)TiO3 thin films with platinum electrodes
Ferroelectric properties of (Ba0.5Sr0.5)TiO3/Pb(Zr0.52Ti0.48)O3/ (Ba0.5Sr0.5)TiO3 thin films with platinum electrodes
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DOI：
10.1063/1.1583137
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发表时间：
2003-06
影响因子：
4
通讯作者：
F. Yan;Yening Wang;H. Chan;C. Choy
中科院分区：
文献类型：
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作者：
F. Yan;Yening Wang;H. Chan;C. Choy
采用脉冲激光沉积方法制备了不同BST层厚度的多层Pt/(Ba0.5Sr0.5)TiO3/Pb(Zr0.52Ti0.48)O3/(Ba0.5Sr0.5)TiO3/Pt(BST/PZT/BST)薄膜。 PZT和Pt电极之间存在BST层可以大大提高PZT薄膜的疲劳性能。然而，由于 PZT 层上施加的电场较低，因此具有较厚 BST 层的异质结构表现出较低的剩余极化。因此，应减小BST层的厚度以降低多层薄膜的工作电压。具有非常薄的 BST 层（厚度~7.5 nm）的异质结构具有良好的铁电性能，例如在 1010 次开关循环后具有高剩余极化和罕见的抗疲劳性。 BST发挥作用的一个可能原因是BST层可以吸收PZT层中的氧空位或其他点缺陷，从而大大提高其疲劳性能。
Multilayered Pt/(Ba0.5Sr0.5)TiO3/Pb(Zr0.52Ti0.48)O3/(Ba0.5Sr0.5)TiO3/Pt (BST/PZT/BST) thin films with different thicknesses of the BST layers were prepared by the pulsed-laser deposition method. The existence of a BST layer between the PZT and Pt electrode can greatly improve the fatigue properties of the PZT film. However, the heterostructure with thicker BST layers exhibits lower remnant polarization because of a lower electric field applied on the PZT layer. So, the thickness of BST layers should be decreased to decrease the working voltage of the multilayered film. A heterostructure with very thin BST layers (thickness ∼7.5 nm) has good ferroelectric properties, such as high remnant polarization and rare fatigue resistance after 1010 switching cycles. A possible reason for the effect of BST is that the BST layer can absorb oxygen vacancies or other point defects from the PZT layer and greatly improve its fatigue properties.