On-chip optical gas sensors based on group-IV materials
On-chip optical gas sensors based on group-IV materials
复制标题
基于 IV 族材料的片上光学气体传感器
DOI：
10.1021/acsphotonics.0c00976
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发表时间：
2020
期刊：
影响因子：
7
通讯作者：
Liu Tiegen
中科院分区：
文献类型：
--
作者：
Wu Jingwen;Yue Gongcheng;Chen Weicheng;Xing Zhengkun;Wang Jiaqi;Wong Wei Ru;Cheng Zhenzhou;Set Sze Yun;Murugan Ganapathy Senthil;Wang Xingjun;Liu Tiegen
在过去的几十年里，紧凑和智能的光学气体传感器引起了人们的极大关注。在用于开发这种气体传感器的材料中，IV族材料，包括硅、锗、碳同素异形体及其化合物，被认为是最有前途的候选者。基于IV族材料的片上光学气体传感器由于其与成熟微电子工业中的CMOS制造工艺的固有兼容性而具有可观的灵敏度和高密度集成的优点。此外，这种传感器具有与其他电子或光子器件集成用于片上信号处理和通信的潜力，预计将在物联网，即时检测以及信息和通信技术中实现多功能应用。本文综述了基于第IV族材料的片上光学气体传感器的基本原理、最新器件和前沿应用，并对其发展前景进行了讨论。
Compact and smart optical gas sensors have attracted significant attention over the past few decades. Among the materials used for developing such gas sensors, group-IV materials, including silicon, germanium, carbon allotropes, and their compounds, are considered the most promising candidates. By virtue of their inherent compatibility with the CMOS fabrication process in the mature microelectronics industry, on-chip optical gas sensors based on group-IV materials have merits of appreciable sensitivity and high-density integration. Moreover, such sensors have promising potential to be integrated with other electronic or photonic devices for on-chip signal processing and communication, which are expected to enable versatile applications in the internet of things, point-of-care testing, and information and communication technology. This paper is the review of basic principles, state-of-the-art devices, and cutting-edge applications of on-chip optical gas sensors based on group-IV materials and discussions of their prospects.