Exploring the depth range for three-dimensional laser machining with aberration correction
Exploring the depth range for three-dimensional laser machining with aberration correction
复制标题
DOI：
10.1364/oe.22.017644
复制
发表时间：
2014-07-28
期刊：
影响因子：
3.8
通讯作者：
Booth, M. J.
中科院分区：
文献类型：
--
作者：
Salter, P. S.;Baum, M.;Booth, M. J.
从空气聚焦到另一种介质时产生的球面像差限制了超快激光加工可以精确保持的深度。我们研究如何可以通过液晶空间光调制器（SLM），在熔融石英单点和并行多点制造使用像差校正扩展的深度范围。在中等数值孔径下（NA = 0.5），在物镜透镜的工作距离处（对应于玻璃中2.4 mm的深度），展示了具有显著水平的平行化的高保真度制造。（NA = 0.75）物镜透镜，单点制造被证明是1毫米的深度，利用全NA，和更深的NA减少，同时保持高的可重复性。我们提出了一个互补的理论模型，使预测的有效性SLM为基础的校正不同的像差幅度。(C)2014年美国光学学会
The spherical aberration generated when focusing from air into another medium limits the depth at which ultrafast laser machining can be accurately maintained. We investigate how the depth range may be extended using aberration correction via a liquid crystal spatial light modulator (SLM), in both single point and parallel multi-point fabrication in fused silica. At a moderate numerical aperture (NA = 0.5), high fidelity fabrication with a significant level of parallelisation is demonstrated at the working distance of the objective lens, corresponding to a depth in the glass of 2.4 mm. With a higher numerical aperture (NA = 0.75) objective lens, single point fabrication is demonstrated to a depth of 1 mm utilising the full NA, and deeper with reduced NA, while maintaining high repeatability. We present a complementary theoretical model that enables prediction of the effectiveness of SLM based correction for different aberration magnitudes. (C) 2014 Optical Society of America