Universal transduction scheme for nanomechanical systems based on dielectric forces
Universal transduction scheme for nanomechanical systems based on dielectric forces
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DOI：
10.1038/nature07932
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发表时间：
2009-04-23
期刊：
影响因子：
64.8
通讯作者：
Kotthaus, Joerg P.
中科院分区：
文献类型：
--
作者：
Unterreithmeier, Quirin P.;Weig, Eva M.;Kotthaus, Joerg P.
任何置于不均匀电场中的可极化物体都受到介电力。这种现象在宏观世界中是众所周知的：当被带电物体接近时，水射流会发生偏转。这一基本机制可用于各种场合，例如，在光镊中捕获微观粒子（1），其中捕获力通过激光束的强度控制，或介电泳（2），其中电场用于操纵液体中的粒子。在这里，我们将基本概念扩展到快速发展的纳米机电系统（NEMS）领域。预计这些系统（5，6，7）可能有广泛的应用，但纳米机械运动的驱动和检测方案仍需优化（8，9）。我们的方法是基于应用的介电梯度力的控制和本地转导NEMS。使用一组片上电极来产生电场梯度，我们将介质谐振器置于可以在高频下调制的吸引力之下。这种通用驱动方案是高效的、宽带的和可扩展的。它还将驱动方案与被驱动的机械元件分离，允许任意极化材料，从而实现潜在的超低耗散NEMS 10。此外，它使简单的电压调谐的机械谐振在一个很宽的频率范围内，因为介电力强烈依赖于谐振器的电极分离。我们使用谐振频率的调制来演示参数驱动（11，12）。此外，我们扭转的驱动原理，实现介电检测，从而允许通用的NEMS转导。我们希望这种结合在基本原理的研究和信号处理和传感等应用中都是有用的。
Any polarizable body placed in an inhomogeneous electric field experiences a dielectric force. This phenomenon is well known from the macroscopic world: a water jet is deflected when approached by a charged object. This fundamental mechanism is exploited in a variety of contexts-for example, trapping microscopic particles in an optical tweezer(1), where the trapping force is controlled via the intensity of a laser beam, or dielectrophoresis(2), where electric fields are used to manipulate particles in liquids. Here we extend the underlying concept to the rapidly evolving field of nanoelectromechanical systems(3,4) (NEMS). A broad range of possible applications are anticipated for these systems(5,6,7), but drive and detection schemes for nanomechanical motion still need to be optimized(8,9). Our approach is based on the application of dielectric gradient forces for the controlled and local transduction of NEMS. Using a set of on-chip electrodes to create an electric field gradient, we polarize a dielectric resonator and subject it to an attractive force that can be modulated at high frequencies. This universal actuation scheme is efficient, broadband and scalable. It also separates the driving scheme from the driven mechanical element, allowing for arbitrary polarizable materials and thus potentially ultralow dissipation NEMS10. In addition, it enables simple voltage tuning of the mechanical resonance over a wide frequency range, because the dielectric force depends strongly on the resonator-electrode separation. We use the modulation of the resonance frequency to demonstrate parametric actuation(11,12). Moreover, we reverse the actuation principle to realize dielectric detection, thus allowing universal transduction of NEMS. We expect this combination to be useful both in the study of fundamental principles and in applications such as signal processing and sensing.