Piezoelectric MEMS-evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era
Piezoelectric MEMS-evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era
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DOI：
10.1088/1361-6439/ac3ab9
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发表时间：
2022-01-01
影响因子：
2.3
通讯作者：
Lee, Chengkuo
中科院分区：
文献类型：
--
作者：
Le, Xianhao;Shi, Qiongfeng;Lee, Chengkuo
第五代移动的网络（5G）和物联网（IoT）的快速发展离不开大量微型、低成本、低功耗的传感器和执行器。压电微机电系统（MEMS）器件通过微机械加工技术制造，为各种高性能传感器、致动器、能量收集器、滤波器和振荡器（用于无线通信的射频前端的主要构建模块）提供了通用平台。本文综述了压电MEMS器件的工作机理、结构设计及其应用。首先介绍了各种压电MEMS传感器，包括接触式和非接触式，针对其在物理、化学和生物传感中的应用。随后介绍了压电MEMS致动器在不同应用场景中的进展。同时，压电MEMS能量采集器，具有供电的其他MEMS器件的能力，有序列举。此外，作为压电谐振器的代表，兰姆波谐振器表现出多方面的性能改进。最后，对可穿戴和可植入压电MEMS器件的发展趋势进行了展望。
The rapid development of the fifth-generation mobile networks (5G) and Internet of Things (IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and actuators. Piezoelectric microelectromechanical system (MEMS) devices, fabricated by micromachining technologies, provide a versatile platform for various high-performance sensors, actuators, energy harvesters, filters and oscillators (main building blocks in radio frequency front-ends for wireless communication). In this paper, we provide a comprehensive review of the working mechanism, structural design, and diversified applications of piezoelectric MEMS devices. Firstly, various piezoelectric MEMS sensors are introduced, including contact and non-contact types, aiming for the applications in physical, chemical and biological sensing. This is followed by a presentation of the advances in piezoelectric MEMS actuators for different application scenarios. Meanwhile, piezoelectric MEMS energy harvesters, with the ability to power other MEMS devices, are orderly enumerated. Furthermore, as a representative of piezoelectric resonators, Lamb wave resonators are exhibited with manifold performance improvements. Finally, the development trends of wearable and implantable piezoelectric MEMS devices are discussed.