Fracture mechanics investigation on crack propagation in the nano-multilayered materials

Fracture mechanics investigation on crack propagation in the nano-multilayered materials
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DOI:
10.1016/j.ijsolstr.2015.03.025
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发表时间:
2015-07
影响因子:
3.6
通讯作者:
Licheng Guo;T. Kitamura;Yabin Yan;T. Sumigawa;Kai Huang
Licheng Guo;T. Kitamura;Yabin Yan;T. Sumigawa;Kai Huang
中科院分区:
工程技术2区
文献类型:
--
作者:
Licheng Guo;T. Kitamura;Yabin Yan;T. Sumigawa;Kai Huang

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为纳米多层材料的断裂力学实验和分析提供了一套新的研究方法。通过在SiN层上制作类裂纹缺口,研究了SiN/Cu纳米悬臂梁中裂纹的扩展行为。观察到两种类型的裂纹扩展行为,包括裂纹在SiN层中的扩展和通过SiN/Cu界面的跨界面裂纹扩展。采用相互作用积分法结合能量分析对裂纹扩展行为进行了数值模拟。讨论了裂纹扩展的动能。发现传统的Griffith准则不适用于目前的脆性断裂过程,提出了基于裂纹扩展动能的新假设,即裂纹将继续扩展,直到累积的动能完全消耗,形成新的裂纹面。而且,该假设与实验结果相一致。这为分析和预测纳米尺度裂纹扩展行为提供了一种有意义的思路。
A set of new investigation method is proposed for the fracture mechanics experiments and analyses of nano-multilayered materials. The crack propagation behavior in a SiN/Cu nano-cantilever is investigated by fabricating a crack-like notch in the SiN layer. Two types of crack propagation behaviors are observed, including crack propagation in SiN layer and crossing-interface crack propagation through SiN/Cu interface. The interaction integral method combined with energy analyses is adopted for numerical simulation of the crack propagation behavior. The kinetic energy of the crack propagation is discussed. It is found that for the present brittle fracture process, the traditional Griffith criterion is not suitable and a new hypothesis based on the kinetic energy of the crack propagation is proposed that the crack will keep propagating until the accumulated kinetic energy is consumed totally to form new crack surface. Moreover, the hypothesis is consistent with the experimental results. It provides a significant thought for the analysis and prediction of nanoscale crack propagation behavior.