Influence of Nose Radius on Surface Integrity in Ultra-precision Cylindrical Turning of Single-crystal Calcium Fluoride☆
Influence of Nose Radius on Surface Integrity in Ultra-precision Cylindrical Turning of Single-crystal Calcium Fluoride☆
复制标题
单晶氟化钙超精密外圆车削刀尖半径对表面完整性的影响☆
DOI：
10.1016/j.procir.2016.02.075
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
Y. Kakinuma
中科院分区：
文献类型：
--
作者：
Yuta Mizumoto;H. Kangawa;Yosuke Nakagawa;Hiroki Itobe;T. Tanabe;Y. Kakinuma
光学微谐振腔作为开发光信号处理电路的重要器件，可以减少能量损耗，引起了人们的广泛兴趣。从光学性质的角度来看，单晶氟化钙（CaF2）可能是最合适的材料。为了满足高的形状精度和表面粗糙度要求，超精密外圆车削是一种可行的加工工艺。以往的研究表明，具有较尖刀尖半径的刀具可以使UPCT更稳定，并减少亚表面损伤。在这项研究中，使用了更小的刀尖半径为0.01 mm的刀具，然后，通过TEM观察对表面完整性的影响进行了研究。
Optical micro-resonators attract interests as essential components to develop optical signal processing circuits which can reduce energy loss. Single-crystal calcium fluoride (CaF2) could be the most suitable material from a viewpoint of optical property. To satisfy high form accuracy and surface roughness, ultra-precision cylindrical turning (UPCT) is a feasible fabrication process. In previous research, it was indicated that the tool with sharper nose radius could make UPCT more stable and reduce subsurface damage. In this study, the tool with much smaller nose radius 0.01 mm was applied, then, the influence on surface integrity was investigated by TEM observation.