Characterization of atmospheric pressure microplasma produced from argon and a mixture of argon-ethylenediamine
Characterization of atmospheric pressure microplasma produced from argon and a mixture of argon-ethylenediamine
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DOI：
10.1016/j.physleta.2014.05.049
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发表时间：
2014-06-27
影响因子：
2.6
通讯作者：
Zimmerman, William B.
中科院分区：
文献类型：
--
作者：
Bashir, M.;Rees, Julia M.;Zimmerman, William B.
本文研究了由纯氩（Ar）和氩气-乙二胺蒸气混合物（Ar/EDA）产生的非热大气压微等离子体。在矩形硼硅玻璃毛细管（4 × 0.4 mm(2)）中，使用工作频率为30khz的正弦电源激发微等离子体。将EDA单体与Ar混合，在微通道内进行等离子体聚合。通过测量放电的光谱和电学参数进行了分析。研究了EDA混合对微通道表面涂层过程中电子、激发和旋转温度等等离子体参数的影响。这些参数在沉积过程中起着重要的作用。通过光谱测量得到的等离子体温度序列为T-e > T-exc > T-vib > T-rot，表明所提出的DBD微等离子体具有非热特性。采用等离子体模拟的方法对氩离子放电参数进行了数值计算。电子温度（二维模拟）和电子密度（三维模拟）的数值预测结果与实验结果吻合较好。(C) 2014 Elsevier B.V.版权所有
A non-thermal atmospheric pressure microplasma generated from pure argon (Ar) and a mixture of argon-ethylenediamine vapors (Ar/EDA) has been characterized in this study. A sinusoidal power supply operating at 30 kHz was used to excite microplasma in a rectangular borosilicate glass capillary (4 x 0.4 mm(2)). The monomer EDA was mixed with Ar in order to perform plasma polymerization inside the microchannel. The analyses were made by measuring spectroscopic and electrical parameters of the discharge. The effects of EDA mixing on plasma parameters such as electron, excitation and rotational temperatures during the process of surface coating of the microchannel were investigated. These parameters play an important role in the deposition process. The plasma temperatures estimated through spectroscopic measurement were found in the sequence T-e > T-exc > T-vib > T-rot, which indicated the non-thermal characteristics of the proposed DBD microplasma. The parameters of the Ar discharge were also numerically computed using plasma simulations. The numerical predictions of electron temperature (2D simulations) and electron density (3D simulations) were found to be in close agreement to those estimated through experiments. (C) 2014 Elsevier B.V. All rights reserved.