Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator
Basic Study on Proximity Sensors Utilizing Air-Film Damping Effect Caused by Longitudinal-Mode Piezoelectric Vibrator
复制标题
DOI：
10.1143/jjap.47.3929
复制
发表时间：
2008-05
影响因子：
1.5
通讯作者：
Ken Yamada;S. Kaneko;T. Nagasawa
中科院分区：
文献类型：
--
作者：
Ken Yamada;S. Kaneko;T. Nagasawa
研究了通过纵模振动器引起的气膜阻尼效应进行接近传感。夹在测试对象和振动（传感）板之间的粘性流体的横向流动受到阻力。因此，它充当振动运动的阻尼器。由于感测板通过纵向模式压电振动器沿其法线方向振动，因此振动器的电特性根据振动器到物体的距离而变化。结果表明，在板到物镜距离小于 0.5 mm 的范围内，振动器的 Q 值从 8,000 降低到 1,000。
Proximity sensing through the air-film damping effect caused by a longitudinal-mode vibrator is studied. Lateral flow of viscous fluid sandwiched between a test object and a vibrating (sensing) plate is subjected to resistive force. Therefore, it acts as a damper for the motion of vibration. Because the sensing plate is vibrated in its normal direction by a longitudinal-mode piezoelectric vibrator, electric properties of the vibrator vary depending on the vibrator-to-object distance. It is shown that the Q-value of the vibrator decreases from 8,000 to 1,000 in the range where the plate-to-objective distance is less than 0.5 mm.