Evaluation of the nano-beam SIMS apparatus
Evaluation of the nano-beam SIMS apparatus
复制标题
纳米束SIMS装置的评价
DOI：
10.1016/j.apsusc.2004.03.176
复制
发表时间：
2004
影响因子：
6.7
通讯作者：
Y. Nihei
中科院分区：
文献类型：
--
作者：
M. Nojima;M. Toi;A. Maekawa;B. Tomiyasu;T. Sakamoto;M. Owari;Y. Nihei
我们已经开发了一个纳米束西姆斯仪进行纳米尺度元素分析的目标。对于具有高空间分辨率的任何类型的分析，重要的是估计横向分辨率或光束尺寸。首先，回顾了纳米束西姆斯装置的一些重要原理。其次，我们使用刀口法估计光束尺寸，然后我们构建了一个由三个因素组成的刀口轮廓模型。最后讨论了有效光束尺寸、光束中心外的低强度拖尾和碰撞级联的扩展。
We have developed a nano-beam SIMS apparatus with the goal of performing nano-dimensional elemental analysis. For any type of analysis with high spatial resolution, it is important to estimate the lateral resolution or beam size. First, some of the important principles of the nano-beam SIMS apparatus are reviewed. Second, we estimated the beam size by using the knife-edge method and then we construct a model for the knife-edge profile consisting of three factors. Finally, we discuss the effective beam size, the low intensity tail outside of the beam center and the spread of the collision cascade.