A new TriBeam system for three-dimensional multimodal materials analysis
A new TriBeam system for three-dimensional multimodal materials analysis
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DOI：
10.1063/1.3680111
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发表时间：
2012-02-01
影响因子：
1.6
通讯作者：
Pollock, Tresa M.
中科院分区：
文献类型：
--
作者：
Echlin, McLean P.;Mottura, Alessandro;Pollock, Tresa M.
超短脉冲飞秒激光器的独特功能与聚焦离子束（FIB）平台集成在一起，创建了一个快速3D材料分析的新系统。飞秒激光允许以高材料去除率在原位逐层材料烧蚀。高脉冲频率（1khz）的超短（150 fs）激光脉冲可以诱导材料烧蚀，几乎不会对周围区域造成热损伤，允许高分辨率成像，以及晶体学和元素分析，而无需中间表面处理或从腔室中取出样品。TriBeam系统结合了DualBeam （TM）显微镜的高分辨率和宽探测能力，以及飞秒激光的高材料去除率，使3D数据集的获取速度比3D FIB数据集快4-6个数量级。讨论了允许激光和电子光学系统耦合的设计特征以及在多个分析位置定位一个阶段。给出了初始的原位多层数据。(C) 2012年美国物理研究所。(doi: 10.1063/1.3680111)
The unique capabilities of ultrashort pulse femtosecond lasers have been integrated with a focused ion beam (FIB) platform to create a new system for rapid 3D materials analysis. The femtosecond laser allows for in situ layer-by-layer material ablation with high material removal rates. The high pulse frequency (1 kHz) of ultrashort (150 fs) laser pulses can induce material ablation with virtually no thermal damage to the surrounding area, permitting high resolution imaging, as well as crystallographic and elemental analysis, without intermediate surface preparation or removal of the sample from the chamber. The TriBeam system combines the high resolution and broad detector capabilities of the DualBeam (TM) microscope with the high material removal rates of the femtosecond laser, allowing 3D datasets to be acquired at rates 4-6 orders of magnitude faster than 3D FIB datasets. Design features that permit coupling of laser and electron optics systems and positioning of a stage in the multiple analysis positions are discussed. Initial in situ multilayer data are presented. (C) 2012 American Institute of Physics. [doi:10.1063/1.3680111]