Integrated Optical Encoder
Integrated Optical Encoder
复制标题
集成光学编码器
DOI：
10.1109/sensor.1995.717173
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
R. Sawada
中科院分区：
文献类型：
--
作者：
R. Sawada
制作了一种由激光二极管、单片光电二极管和氟化聚酰亚胺波导组成的集成光学编码器。它可以判断光栅刻度的运动方向，测量刻度与编码器之间的相对位移，分辨率在0.01/spl mu/m数量级。通过整合庞大的组件，并使用从激光二极管的两个蚀刻镜发射的两束光，这个编码器做得尽可能小。同样的设计理念也适用于其他光学微传感器。
An integrated optical encoder consisting of a laser diode, monolithic photodiodes, and a fluorinated polyimide waveguide has been fabricated. It can determine which direction the grating scale is moving and can measure the relative displacement between the scale and the encoder, with a resolution on the order of 0.01/spl mu/m. By integrating the bulky components and using two beams emitted from two etched mirrors of the laser diode, this encoder is made as small as possible. The same design concept can be applied to other optical micro-sensors.