Highly Stable Spatio-Temporal Mechanical Characterization of Nanocontact between Sharp Tips Using Electrostatic Microactuator inside Transmission Electron Microscope
Highly Stable Spatio-Temporal Mechanical Characterization of Nanocontact between Sharp Tips Using Electrostatic Microactuator inside Transmission Electron Microscope
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DOI：
10.1143/jjap.50.077201
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发表时间：
2011-07-01
影响因子：
1.5
通讯作者：
Fujita, Hiroyuki
中科院分区：
文献类型：
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作者：
Ishida, Tadashi;Sato, Takaaki;Fujita, Hiroyuki
建立了微机电系统透射电子显微镜（MEMS-in-TEM）装置，用于表征在尖端之间捕获或生成的纳米结构的机械性能，同时观察其形状和变形。该装置以亚纳米精度实现了数十分钟的稳定驱动，并实现了空间分辨率为 0.2 nm 的精确 TEM 观察。通过 TEM 图像测量具有和不具有纳米结构的尖端移动致动器的位移；它们之间的差异表明施加到纳米结构上的力。通过将位移差乘以尖端支撑梁的弹簧常数来获得力。在这里，我们在 TEM 观察下以 0.1 nm/s 的驱动速度对尖端之间的金纳米接触进行了 10 分钟的接近-形成-回缩-断裂实验。测量了收缩断裂过程中的力。由于位错的存在导致加工硬化，最大力为 66 nN。该装置将成为检查原子尺度结构对机械特性和极低速动力学的作用的强大工具。 (C) 2011 日本应用物理学会
A microelectromechanical systems-in-transmission electron microscope (MEMS-in-TEM) setup was established to characterize mechanical properties of a nanostructure captured or generated between tips, while observing its shape and deformation. This setup achieved a stable actuation for several tens of minutes with sub-nm accuracy, and a precise TEM observation of 0.2 nm in spatial resolution. The displacements of a tip-moving actuator with and without the nanostructure were measured from TEM images; the difference between them indicates a force applied to the nanostructure. The force was obtained by multiplying the displacement difference with a spring constant of supporting beams of the tip. Here, we performed an approach-formation-retraction-fracture experiment of a gold nanocontact between tips under TEM observation over 10 min at the actuation speed of 0.1 nm/s. The force during the retraction-fracture process was measured. The maximum force was 66 nN due to the work hardening by the existence of dislocations. This setup will be a powerful tool to examine the role of atomic scale structure for the mechanical characteristics and the extremely-low-speed kinetics. (C) 2011 The Japan Society of Applied Physics