RECORDING CHARACTERISTICS OF RIGID DISKS WITH CO-BASED ALLOY FILMS USING DURABLE SILICON SUBSTRATES
RECORDING CHARACTERISTICS OF RIGID DISKS WITH CO-BASED ALLOY FILMS USING DURABLE SILICON SUBSTRATES
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DOI：
10.1063/1.365021
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发表时间：
1997-04
影响因子：
3.2
通讯作者：
K. Noda;T. Kawanabe;M. Naoe
中科院分区：
文献类型：
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作者：
K. Noda;T. Kawanabe;M. Naoe
研究了使用硅基底的钴基合金薄膜用于高密度磁记录盘的情况。硅盘基板具有多种优点，例如微观超平坦表面粗糙度在 1 nm 或更小范围内，从而实现比以往更低的飞行高度、用于伺服图案的凹槽的光刻制造、基板的排气最少、比铝或玻璃基板更高的基板温度以及比玻璃基板更高的机械强度。最近的硅基板具有机械耐用性，因为由于倒角和打孔等加工工艺的巨大改进，它们比以前的基板具有更少的微裂纹。在这项研究中，Co85Cr13Ta2/Cr 薄膜是在 100 °C 的基板温度和 0.2 mTorr 的氩气压力下，通过在 2.5 英寸 Si 基板上进行面对靶溅射来沉积的。将碳保护层和 Z-DOL 润滑剂涂在磁性层的顶部。它们的磁特性和记录特性...
Co-based alloy films using silicon substrates were investigated for high-density magnetic recording disks. Silicon-disk substrates have several advantages, such as microscopically ultraflat surface roughness in the range of 1 nm or less, which results in a lower than ever flying height, lithographic fabrication of grooves for servo patterns, minimal outgassing from the substrates, higher substrate temperatures than for aluminum or glass substrates, and higher mechanical strength than for glass substrates. Recent Si substrates are mechanically durable because they have fewer microcracks than previous ones as a result of large improvements in machining processes such as chamfering and holing. In this study, Co85Cr13Ta2/Cr films were deposited by facing targets sputtering on 2.5 in. Si substrates at a substrate temperature of 100 °C and an argon gas pressure of 0.2 mTorr. A carbon protective layer and Z-DOL lubricant were applied on top of the magnetic layers. Their magnetic properties and recording characte...