Reaction Pathway: Aqueous Hexatantalate Clusters to High-Density Tantalum Oxide Nanofilms
Reaction Pathway: Aqueous Hexatantalate Clusters to High-Density Tantalum Oxide Nanofilms
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反应途径：水性六钽酸盐簇形成高密度氧化钽纳米膜
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
D. Keszler
中科院分区：
文献类型：
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作者：
Ryan H. Mansergh;L. Fullmer;Deok;M. Nyman;D. Keszler
从水溶液氧代羟基磷灰石[（CH 3）4 N]6[H2 Ta 6 O 19]·xH 2 O到Ta 2 O 5薄膜的反应路径解释了所观察到的薄膜形貌特征-高密度、均匀、无孔和光滑。薄膜脱水和四甲基铵的热分解，观察通过程序升温脱附。通过X射线衍射、X射线反射率、扫描电子显微镜、透射电子显微镜、原子力显微镜和椭圆偏振光谱仪研究了薄膜的形态、结构和光学性质。（CH 3）4 N+反应产物的演化与聚氧乙烯簇的缩合和结构弛豫相一致，导致薄膜密度高达95%的单晶β-Ta 2 O 5。该工艺能够沉积个位数纳米厚度的薄膜。
The reaction path from aqueous oxohydroxometalate [(CH3)4N]6[H2Ta6O19]·xH2O to Ta2O5 thin film explains observed thin-film morphological characteristics–high density, uniform, pore free, and smooth. Film dehydration and tetramethylammonium thermal decomposition were observed via temperature-programmed desorption. The morphological, structural, and optical properties of the films were examined by X-ray diffraction, X-ray reflectivity, scanning electron microscopy, transmission electron microscopy, atomic force microscopy, and spectroscopic ellipsometry. Evolution of (CH3)4N+ reaction products in concert with condensation of the polyoxometalate clusters and structural relaxation led to film densities as high as 95% of single-crystal β-Ta2O5. The process enabled film deposition with single-digit-nanometer thickness.