Laser machining of sensing components on the end of optical fibres
Laser machining of sensing components on the end of optical fibres
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DOI：
10.1088/0960-1317/23/4/045021
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发表时间：
2013-04-01
影响因子：
2.3
通讯作者：
Hand, Duncan P.
中科院分区：
文献类型：
--
作者：
Albri, Frank;Li, Jun;Hand, Duncan P.
Micro-cantilevers play a major role in sensing, especially since the invention of the atomic force microscope. Applications range from surface profiling to bio-medical sensing enabled through coating-activated cantilevers. Current readout methods are based on either optical deflection (of a laser beam reflected from the cantilever surface) or piezo-resistive response (of piezo-electric elements bonded to the cantilever surface). The first of these approaches requires significant space whilst the second is sensitive to electromagnetic effects. An alternative solution is to manufacture a cantilever onto the end of an optical fibre and use interferometry to monitor its deflection; in this paper we describe the development and application of a picosecond-laser machining process to fabricate such a device. The development of techniques to avoid cracking and debris re-deposition during this machining process is described, and a cantilever sensor with excellent optical performance is demonstrated and tested.
