SWIR Detection of Front Side Illumination InGaAs PhotoFETs on Si Substrate through Layer Transfer Technology

SWIR Detection of Front Side Illumination InGaAs PhotoFETs on Si Substrate through Layer Transfer Technology
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通过层转移技术对硅衬底上的前侧照明 InGaAs PhotoFET 进行短波红外 (SWIR) 检测

DOI:
10.1380/vss.64.74
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发表时间:
2021
期刊:
Vacuum and Surface Science
影响因子:
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通讯作者:
MAEDA Tatsuro
MAEDA Tatsuro
中科院分区:
--
文献类型:
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作者:
OISHI Kazuaki;ISHII Hiroyuki;CHANG Wen-Hsin;SHIMIZU Tetsuji;ISHII Hiroto;FUJISHIRO Hiroki;ENDOH Akira;MAEDA Tatsuro

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