Increase of $Q$-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil
Increase of $Q$-Factor of RF Magnetic Thin Film Inductor by Introducing Slit-Patterned Magnetic Thin Film and Multiline-Conductor Spiral Coil
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DOI：
10.1109/tmag.2011.2147287
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发表时间：
2011-09
影响因子：
2.1
通讯作者：
T. Maruyama;Y. Obinata;M. Sonehara;K. Ikeda;T. Sato
中科院分区：
文献类型：
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作者：
T. Maruyama;Y. Obinata;M. Sonehara;K. Ikeda;T. Sato
为了提高射频磁性薄膜电感的品质因数，对两种提高射频磁性薄膜电感品质因数的方案进行了实验研究。为了抑制磁性薄膜的面内涡流，引入了狭缝图案结构，并且发现狭缝图案磁性薄膜对于提高Q因子是非常有效的。另一方面，为了抑制交流（ac）铜损，引入了多线导体螺旋线圈，并且发现多线线圈对于改善高频电感的降低是有效的。通过引入这两种方案，在1.5 GHz的最大Q值为18的螺旋电感与底部狭缝图案的CoFeSiO/SiO2颗粒多层膜和三线导体螺旋线圈。
In order to increase Q -factor of radio-frequency (RF) magnetic thin film inductor integrated in chip-size-package RF-ICs, two schemes have been investigated experimentally. For suppressing the in-plane eddy current of the magnetic thin film, a slit-patterned structure was introduced, and it was found that the slit-patterned magnetic thin film is very effective for increasing Q-factor. On the other hand, for suppressing alternating current (ac) copper loss, a multiline-conductor spiral coil was introduced, and it was found that the multiline coil is effective for improving decrease of inductance at high frequencies. By introducing the two schemes, a maximum Q-factor of 18 at 1.5 GHz was obtained in a spiral inductor with a bottom slit-patterned CoFeSiO/SiO2 granular multilayer film and triple-line-conductor spiral coil.