Tip–sample distance control for near-field scanning microwave microscopes
Tip–sample distance control for near-field scanning microwave microscopes
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近场扫描微波显微镜的尖端-样品距离控制
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
Jaekwang Lee
中科院分区：
文献类型：
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作者：
Myungsick Kim;Songhui Kim;Jooyoung Kim;Kiejin Lee;B. Friedman;Jin;Jaekwang Lee
本文设计了一种近场扫描微波显微镜（NSMM），该显微镜采用音叉剪切力反馈方法来控制探针与样品之间的距离。这种距离控制方法不受局部微波特性的影响。NSMM的探头尖端连接在石英音叉的一个尖头上，并直接连接到一个工作频率为f= 4.5-5.5 GHz的高质量微带谐振器和介电谐振器。在反馈系统中，音叉的振幅作为距离控制参数。为了证明距离调节系统的能力，我们给出了不均匀导电金属样品的地形图像，并将其高度响应与NSMM图像进行了比较。
We demonstrate a near-field scanning microwave microscope (NSMM) which uses a tuning fork shear-force feedback method to control the distance between tip and sample. This distance control method is independent of local microwave characteristics. The probe tip for the NSMM is attached to one prong of a quartz tuning fork and directly coupled to a high-quality microstrip resonator with a dielectric resonator at an operating frequency of f=4.5–5.5 GHz. The amplitude of the tuning fork was used as a distance control parameter in the feedback system. To demonstrate the ability of the distance regulation system, we present topographic images of an uneven conducting metal sample and compare the height response and the NSMM image.