Electrical Characteristics of Nitrogen-Doped Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Coaxial Arc Plasma Deposition
Electrical Characteristics of Nitrogen-Doped Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Coaxial Arc Plasma Deposition
复制标题
同轴电弧等离子体沉积掺氮超纳米晶金刚石/氢化非晶碳复合薄膜的电学特性
DOI:
10.7567/apex.8.095101
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发表时间:
2015
期刊:
影响因子:
--
通讯作者:
and Tsuyoshi Yoshitake
中科院分区:
文献类型:
--
作者:
Abdelrahman Zkria;Hiroki Gima;Mahmoud Shaban;and Tsuyoshi Yoshitake