Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences
Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences
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俄罗斯科学院微结构物理研究所多层X射线光学研究现状及发展前景
DOI：
10.1134/s1027451017010049
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
A. Shcherbakov
中科院分区：
文献类型：
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作者：
A. Akhsakhalyan;E. Kluenkov;A. Lopatin;V. I. Luchin;A. N. Nechay;A. Pestov;V. Polkovnikov;N. Salashchenko;M. Svechnikov;M. Toropov;N. Tsybin;N. Chkhalo;A. Shcherbakov
由于最近在多层反射镜沉积领域的成功以及制造超光滑和高精度反射镜基板的程序，将传统光学方法应用于软x射线和极紫外（紫外线）辐射波段的真正机会已经出现。这一机会的实现为物质的纳米诊断学、微纳米电子学、微生物学、太阳天文学和其他应用开辟了全新的前景。介绍了俄罗斯科学院微观结构物理研究所开发的多层x射线光学的主要方向，并考虑了其在科学和技术中的应用方面。讨论了软x射线和极紫外波段多层干涉结构制备过程中存在的主要问题。介绍了在各个研究方向范围内最近取得的主要成果。对这些方向的未来发展计划进行了讨论。
A real opportunity for applying traditional optical methods to soft X-ray and extreme UV (ultraviolet) radiation bands has appeared thanks to recent successes in the area of multilayer-mirror deposition and procedures for fabricating supersmooth and highly precise substrates of mirrors. The implementation of this opportunity opens up fundamentally new prospectss in the nanodiagnostics of substances, micro- and nanoelectronics, microbiology, solar astronomy and other applications. The main directions in multilayer X-ray optics developed at the Institute for the Physics of Microstructures, Russian Academy of Sciences, are presented and the aspects of the use thereof in science and technology are considered. The main problems arising during the fabrication of multilayer interference structures for the soft X-ray and extreme UV bands are discussed. The main results obtained recently in the scope of each direction of investigation are presented. Plans for the future development of these directions are discussed.