Changes in Physical Properties and Structure of Sol-Gel Derived SiO2 Films in an Environment of High Temperature and High Humidity
Changes in Physical Properties and Structure of Sol-Gel Derived SiO2 Films in an Environment of High Temperature and High Humidity
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高温高湿环境下溶胶-凝胶法SiO2薄膜物理性能和结构的变化
DOI：
10.2109/jcersj.102.330
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
T. Minami
中科院分区：
文献类型：
--
作者：
A. Matsuda;Y. Matsuno;S. Katayama;T. Tsuno;N. Tohge;T. Minami
研究了在凝胶膜中加入聚乙二醇（PEG）对SiO2涂层膜的光学性能和结构的影响。PEG的用量越大、分子量越大，在热处理过程中PEG的分解产生的SiO2膜中的孔体积越大。这种多孔膜的折射率被发现增加，由于在膜中吸附的水。另一方面，在高温高湿环境中处理后，膜的孔隙率和吸附水的量降低。孔隙率和吸附水量的降低在添加较大量的具有较大分子量的PEG制备的膜中更显着。红外吸收光谱和透射电镜观察结果表明，高温高湿处理使薄膜中硅醇基团减少，薄膜致密化。
The effects of addition of poly (ethylene glycol) (PEG), to gel films on the optical properties and structure of the resultant SiO2 coating films have been studied before and after being subjected to an environment of high temperature and high humidity. The larger amount and the larger molecular weight of PEG produced the larger volume of pores in the resultant SiO2 films on the decomposition of PEG during the heat-treatment. The refractive index of such porous films was found to increase due to water adsorbed in the films. On the other hand, the porosity and the amount of adsorbed water of the films decreased after the treatment in an environment of high temperature and high humidity. The decreases in porosity and the amount of adsorbed water were more significant in the films prepared with the addition of the larger amount of PEG with a larger molecular weight. These findings can be ascribed to the decrease in silanol groups and densification of the films with the treatment at high temperature and high humidity, as confirmed by the changes in IR absorption spectra and the results of TEM observation.