Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method.
Two-chamber integrated multichannel narrowband filter prepared by a multistep etching method.
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DOI：
10.1364/ao.46.000867
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发表时间：
2007-02
期刊：
影响因子：
1.9
通讯作者：
Hongfei Jiao;Yonggang Wu;Guoxun Tian;Shaowei Wang;Hong Cao;L. Zhang;L. Fu
中科院分区：
文献类型：
--
作者：
Hongfei Jiao;Yonggang Wu;Guoxun Tian;Shaowei Wang;Hong Cao;L. Zhang;L. Fu
A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.
