Design, fabrication, performance and reliability of Pt- and RuO2-coated microrelays tested in ultra-high purity gas environments
Design, fabrication, performance and reliability of Pt- and RuO2-coated microrelays tested in ultra-high purity gas environments
复制标题
DOI：
10.1088/0960-1317/22/10/105027
复制
发表时间：
2012-10-01
影响因子：
2.3
通讯作者：
Ohlhausen, J. A.
中科院分区：
文献类型：
--
作者：
de Boer, M. P.;Czaplewski, D. A.;Ohlhausen, J. A.
我们已经制造，测试和分析的可靠性的Pt和RuO2涂层欧姆微型继电器在超高纯度气体环境。RuO2涂层的继电器可以经受3 × 10（8）次接触循环而不发生电降解，而Pt涂层的器件在10（5）次循环后发生降解。热致动微继电器制造使用的过程中，采用了多晶硅表面微机械结构。在释放设备后，只需要几个毯式金属沉积来创建不同的涂层。这种方法允许在不同的涂层材料之间进行直接比较，并且通过在不同的迹线之间提供电隔离的自对准荫罩来实现。测试是在一个干净的环境中进行的，通过现场超高真空烘烤，腔室冷却，
We have fabricated, tested and analyzed the reliability of Pt- and RuO2-coated ohmic microrelays in ultra-high purity gas environments. RuO2-coated relays could survive 3 x 10(8) contact cycles without electrical degradation, while Pt-coated devices degraded after 10(5) cycles. Thermally actuated microrelays were fabricated using a process that employed a polysilicon surface-micromachined substructure. After releasing the devices, just a few blanket metal depositions were required to create the different coatings. This method allowed direct comparisons between different coating materials, and was enabled by a self-aligned shadow mask that provides electrical isolation between different traces. Testing was performed in a clean environment achieved through in situ ultra-high vacuum bakeouts, chamber cooling to