A transparent polymeric flexure-hinge nanopositioner, actuated by a piezoelectric stack actuator
A transparent polymeric flexure-hinge nanopositioner, actuated by a piezoelectric stack actuator
复制标题
DOI：
10.1088/0957-4484/22/33/335501
复制
发表时间：
2011-08-19
期刊：
影响因子：
3.5
通讯作者：
Jeong, Young Hun
中科院分区：
文献类型：
--
作者：
Chae, Ki Woon;Kim, Wook-Bae;Jeong, Young Hun
利用压电驱动和柔性机构进行纳米定位是纳米尺度定位最常用的方法之一。一般来说，柔性机构的纳米定位器是由金属制成的。因此，它们在各种环境中的应用需要仔细考虑腐蚀和周长干扰。在这项研究中，我们提出了一种配备压电驱动的芯片状聚合物挠性纳米对立器的概念。在其设计中，使用有限元变形和应力分析来预测运动性能，并通过注射成型模拟来考虑注射成型性，以允许通过注射成型制造。采用中尺度注射成型工艺制备了一种环烯烃共聚物纳米乳液。实验表明，所开发的纳米逆变器行程范围为15 μ m，线性度高，可以通过含低通滤波器的比例积分导数（PID）算法成功控制，控制误差为3 nm。
Nanopositioning using piezoelectric actuation and a flexure mechanism is one of most common methods for nanometre-scale positioning. Generally, flexure mechanism nanopositioners have been made from metal. Thus, their application to various environments needs careful consideration with regard to corrosion and circumference interference. In this study, we propose the concept of a chip-like polymeric flexure-based nanopositioner equipped with piezoelectric actuation. In its design, motion performance was predicted using finite element analysis of deformation and stress, and injection mouldability was considered through an injection moulding simulation to allow for fabrication by injection moulding. A cyclic olefin copolymer nanopositioner was fabricated using a mesoscale injection moulding process. Experiments demonstrated that the developed nanopositioner had a travel range of 15 mu m with high linearity and it could be successfully controlled by a proportional-integral-derivative (PID) algorithm including a low-pass filter with a root mean square control error of 3 nm.