Integration of lateral porous silicon membranes into planar microfluidics
Integration of lateral porous silicon membranes into planar microfluidics
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DOI：
10.1039/c4lc01094a
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发表时间：
2015-01-01
期刊：
影响因子：
6.1
通讯作者：
Bourrier, David
中科院分区：
文献类型：
--
作者：
Leichle, Thierry;Bourrier, David
在这项工作中，我们提出了一种新的制造工艺，使横向多孔硅薄膜能够单片集成到单层平面微通道中。这种制造技术依赖于局部电极的图案化来在膜内水平引导孔形成，并依赖于绝缘体上硅衬底的使用来在沟道深度内对多孔硅进行空间定位。通过对电流的有限元分析，研究了该方法的可行性，并在20微米深的微通道内形成了10微米长的介孔膜。当单链DNA和免疫球蛋白G等大分子渗透到膜中时，所制得的膜充分保留了直径为300 nm的小球，因此有可能用于末端微滤。实验测定的流体阻力与估计的孔径和孔隙率的理论值一致。本文介绍的工作有望极大地简化基于尺寸排除的分离膜与流体设备的集成，并为多孔硅在芯片设备上的平面实验室中的使用打开大门。
In this work, we present a novel fabrication process that enables the monolithic integration of lateral porous silicon membranes into single-layer planar microchannels. This fabrication technique relies on the patterning of local electrodes to guide pore formation horizontally within the membrane and on the use of silicon-on-insulator substrates to spatially localize porous silicon within the channel depth. The feasibility of our approach is studied by current flow analysis using the finite element method and supported by creating 10 mu m long mesoporous membranes within 20 mu m deep microchannels. The fabricated membranes are demonstrated to be potentially useful for dead-end microfiltration by adequately retaining 300 nm diameter beads while macromolecules such as single-stranded DNA and immunoglobulin G permeate the membrane. The experimentally determined fluidic resistance is in accordance with the theoretical value expected from the estimated pore size and porosity. The work presented here is expected to greatly simplify the integration of membranes capable of size exclusion based separation into fluidic devices and opens doors to the use of porous silicon in planar lab on a chip devices.