Optimization of layered synthetic microstructures for broadband reflectivity at soft x-ray and EUV wavelengths.

Optimization of layered synthetic microstructures for broadband reflectivity at soft x-ray and EUV wavelengths.
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DOI:
10.1364/ao.26.000990
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发表时间:
1986-08
期刊:
影响因子:
1.9
通讯作者:
J. Meekins;R. Cruddace;H. Gursky
J. Meekins;R. Cruddace;H. Gursky
中科院分区:
工程技术4区
文献类型:
--
作者:
J. Meekins;R. Cruddace;H. Gursky

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描述了一种技术,该技术允许层状合成微结构中的每层的厚度在软X射线和EUV波段中在几百埃宽的宽波长带上产生有用的恒定效率。
A technique is described which allows the thickness of each layer in a layered synthetic microstructure to yield a useful constant efficiency over a broad band of wavelengths, several hundred angstroms wide, in the soft x-ray and EUV wave bands.