Multi-directional Switching Valve Chip with the Rotary Mechanism (1st Report, Verification of Multiple-directional Switching Principle Using the Rotary Mechanism)
Multi-directional Switching Valve Chip with the Rotary Mechanism (1st Report, Verification of Multiple-directional Switching Principle Using the Rotary Mechanism)
复制标题
带旋转机构的多向切换阀芯片（第1次报告，利用旋转机构的多向切换原理验证）
DOI：
10.1299/kikaic.73.811
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
K. Ikuta
中科院分区：
文献类型：
--
作者：
T. Hasegawa;K. Nakashima;K. Ikuta
成功开发了世界上第一个作为生化集成电路芯片之一的10路微开关阀芯片。该开关阀芯片具有特殊的硅橡胶防漏旋转机构和精确的自动定位机构。该芯片在高泄漏压力（> 700kpa）下，成功地从一个入口切换10个出口，没有死压。由于微加工是由我们的原始“混合微立体光刻”（hybrid- ih工艺）完成的，因此不需要微组装和键合。这种芯片一般适用于各种微化学器件。
The world's first 10-way micro switching valve chip as one of Biochemical IC chip was developed successfully. This switching valve chip has a special rotary mechanism with the silicon rubber leak-preventions and the precise auto-positioning mechanism. This chip succeeded to switch ten outlets from one inlet without dead volume under high leakage pressure (>700 kPa). Since the micro fabrication was made by our original “hybrid microstereolithography” (hybrid-IH process), the micro assembling and bonding are not needed. This chip is generally useful for various kinds of micro chemical devices.