Constant Velocity High Force Microactuator for Stick-Slip Testing of Micromachined Interfaces
Constant Velocity High Force Microactuator for Stick-Slip Testing of Micromachined Interfaces
复制标题
用于微机械接口粘滑测试的恒速高力微执行器
DOI：
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发表时间：
2015
影响因子：
2.7
通讯作者：
M. D. de Boer
中科院分区：
文献类型：
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作者：
S. Shroff;M. D. de Boer
在多微凸体摩擦试验平台上，采用人字形热驱动器作为恒速拉伸器。该平台可实现拉料器速度（1-3100 μm/s，3.5个十倍）、法向载荷（2-4500 μN，3.4个十倍）和弹簧常数（0.06-100 μN/μm，3.2个十倍）的广泛变化。这些特性是通过利用与机械时间常数相比较长的致动器热时间常数结合迭代学习控制来实现的。致动器和摩擦块之间的良好热隔离通过将热量分流到基板来实现。测试了未涂覆和FOTAS [十三碳三（二甲氨基）硅烷，CF 3（CF2）5（CH 2）2Si（N（CH 3）2）3]涂覆的器械，正常载荷诱导从稳定滑动到粘滑的转变。该平台可用于绘制微尺度动摩擦相图，包括确定粘滑到稳态滑动分叉线，进行启停试验和瞬时速度变化试验，以及推断涂层磨损性能随载荷和速度变化的信息。
A chevron thermal actuator has been implemented as a constant velocity puller in a multiasperity frictional test platform. This platform enables a wide variation of puller velocity (1-3100 μm/s, 3.5 decades), normal load (2-4500 μN, 3.4 decades), and spring constant (0.06-100 μN/μm, 3.2 decades). These characteristics are achieved by leveraging the actuator thermal time constant, which is long compared with the mechanical time constant, in combination with iterative learning control. Good thermal isolation between the actuator and the friction block is achieved by shunting heat to the substrate. Uncoated and FOTAS [tridecafluorotris(dimethylamino)silane, CF3(CF2)5(CH2)2Si(N(CH3)2)3]-coated devices were tested, and normal load induced a transition from steady sliding to stick-slip. This platform could have several important uses for mapping microscale kinetic friction phase diagrams, including determining the stick-slip to steady sliding bifurcation line, performing startstop tests and instantaneous velocity change tests, and inferring information on wear performance of coatings as a function of load and velocity.