Nano precision on-machine profiling of curved diamond cutting tools using a white-light interferometer

Nano precision on-machine profiling of curved diamond cutting tools using a white-light interferometer
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DOI:
10.1504/ijsurfse.2007.016695
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发表时间:
2007
影响因子:
0.8
通讯作者:
Jiwang Yan;Hiroyasu Baba;Y. Kunieda;N. Yoshihara;T. Kuriyagawa
Jiwang Yan;Hiroyasu Baba;Y. Kunieda;N. Yoshihara;T. Kuriyagawa
中科院分区:
工程技术4区
文献类型:
--
作者:
Jiwang Yan;Hiroyasu Baba;Y. Kunieda;N. Yoshihara;T. Kuriyagawa

文献摘要

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提出了一种曲面金刚石刀具轮廓精度的非接触在机测量方法。该系统是基于一个紧凑的白光干涉仪,这是安装在一个三轴数控超精密机床。提出了一种利用三维测量数据自动识别切削刃位置的算法。在此基础上,提取了刀具的截面轮廓,得到了刀具轮廓误差的分布。为了测量具有宽窗口角和大曲率的工具,已经提出了一种数据拼接技术,用于连接来自工具的各个方向的单独测量的轮廓。
A non-contact on-machine measurement method is proposed for evaluating the profile accuracy of curved diamond cutting tools. The system is based on a compact white-light interferometer which is mounted on a three-axis numerical-controlled ultraprecision machine tool. An algorithm was developed to automatically identify the cutting edge location using the three-dimensional measurement data. Then the cross-sectional profile of the tool is extracted and the distribution of tool profile error is obtained. To measure tools with wide window angles and large curvatures, a data-stitching technique has been proposed for connecting the individually measured profiles from various orientations of the tool.