Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu-Fe thin films
Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu-Fe thin films
复制标题
DOI：
10.1063/5.0014441
复制
发表时间：
2020-07-21
影响因子：
3.2
通讯作者：
Misra, Amit
中科院分区：
文献类型：
--
作者：
Derby, Benjamin K.;Chatterjee, Arya;Misra, Amit
双连续纳米复合薄膜的形貌在很大程度上取决于物理气相沉积过程中施加的沉积条件。随着高功率脉冲磁控溅射（HiPIMS）的引入，在沉积过程中实现的潜在形态的范围已经增加。在这项工作中，我们比较了传统的直流磁控溅射（DCMS）和HiPIMS的铜和铁的薄膜共沉积之间的沉积结果。模块化控制的柱状性，孔隙率和粗糙度实现了通过改变沉积过程中的Cu和Fe金属离子电流。随着离子电流的增加，纳米结构相分离形态的方向性也得到控制。在零离子电流的Cu和Fe溅射物种在DCMS，膜表现出横向浓度调制的Cu和Fe。富Cu相和富Fe相的方向性在低离子电流IF e = 1 mml：mspace width=".1em“mml：mspaceA和IC u = 0.1 mml：mspace width=".1em“mml：mspaceA下转变为垂直浓度调制，在相对中等的离子电流IF e = 5 mml：mspace width=".1em“mml：mspaceA和IC u = 2 mml：mspace width =".1em“mml：mspaceA下转变为横向浓度调制。在IF e = 18 mml：mspace width=".1em“mml：mspaceA和IC u = 2 mml：mspace width=".1em”/mml：mspaceA的高离子电流下，在纳米尺度上观察到更随机的相畴结构。这种结构转变是合理的使用相互扩散模型。不同种类的相分离的形态，实现DCMS沉积过程中，对机械性能的作用也进行了研究。结果表明，随着压痕应变速率的增加，硬度，压痕模量和流动强度值增加。双连续Cu-Fe纳米复合材料被发现比多层Cu-Fe样品更强。
Bicontinuous, nanocomposite thin film morphologies depend largely on the deposition conditions applied during physical vapor deposition. With the introduction of high-power impulse magnetron sputtering (HiPIMS), the range of potential morphologies achieved during deposition has been increased. In this work, we compare the deposition outcomes between traditional direct-current magnetron sputtering (DCMS) and HiPIMS for a thin film co-deposit of Cu and Fe. Modular control of the columnarity, porosity, and roughness was achieved by varying the Cu and Fe metal ion currents during deposition. The directionality of the nanostructured phase-separated morphology was also controlled as the ion current increased. At zero ion current for both Cu and Fe sputtered species during DCMS, the film exhibited lateral concentration modulations of Cu and Fe. The directionality of the Cu- and Fe-rich phases shifted to vertical concentration modulations at low ion currents ofIF e = 1 mml:mspace width=".1em"mml:mspaceA andIC u = 0.1 mml:mspace width=".1em"mml:mspaceA and to lateral concentration modulations at relatively moderate ion currents ofIF e = 5 mml:mspace width=".1em"mml:mspaceA andIC u = 2 mml:mspace width=".1em"mml:mspaceA . At high ion currents ofIF e = 18 mml:mspace width=".1em"mml:mspaceA andIC u = 2 mml:mspace width=".1em"/mml:mspaceA , a more randomized phase domain structure was observed on the nanoscale. This structural shift is rationalized using an interdiffusion model. The role of different kinds of phase-separated morphologies, achieved during DCMS deposition, on the mechanical properties has also been studied. Results indicated an increase in hardness, indentation modulus, and flow strength values with the increase in indentation strain rates. Bicontinuous Cu-Fe nanocomposites are found to be stronger than multilayer Cu-Fe samples.