Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide
Ultra-High Sensitive Gas Detection Using Pulse-Driven MEMS Sensor Based on Tin Dioxide
复制标题
使用基于二氧化锡的脉冲驱动 MEMS 传感器进行超高灵敏度气体检测
DOI：
10.1109/isoen.2019.8823211
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Kengo Shimanoe
中科院分区：
文献类型：
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作者：
Koichi Suematsu;Wataru Harano;Tokiharu Oyama;Nan Ma;Ken Watanabe;Kengo Shimanoe
微型半导体气体传感器由微加热器和传感器电极组成，允许快速加热器切换，脉冲驱动操作。在气敏器件上制备了SnO2纳米颗粒，并在加热器开启阶段在高温下驱动传感器。此外，在加热器关闭阶段将气体引入传感层，冷却传感层。根据电阻在脉冲驱动下的行为，我们确定了各种类型的传感器响应，以改善气敏特性。由于脉冲驱动方式的传感器利用率高于传统的传感器，因此脉冲驱动方式大大提高了传感器的气敏性能。此外，新的气体感测定义也增强了气体选择性，因为在加热器关闭阶段期间气体在感测层中积聚。因此，脉冲驱动方式提高了半导体气敏传感器的性能。
Miniaturized semiconductor gas sensors composed of microheater and a sensor electrode allowed a rapid heater switching, pulse-driven operation. SnO2nanoparticles was fabricated on the gas sensor device, and the sensor was driven during heater on phase at elevated temperature. Additionally, the gas was introducing into the sensing layer during heater off phase, cooling the sensing layer. On the basis of the behavior of the electrical resistance under pulse-driving, we determined the various types of sensor responses to improve the gas sensing characteristics. The gas sensitivity was drastically enhanced by pulse-driving mode, because utility factor of the pulse-driven sensor was higher than that of conventional sensor. Additionally, newly gas sensing definition also enhanced the gas selectivity, because gas accumulates in the sensing layer during heater off phase. Therefore, pulse-driving mode improved the ability of semiconductor gas sensors.