Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method
Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method
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DOI：
10.1016/j.apsusc.2012.12.041
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发表时间：
2013-02
影响因子：
6.7
通讯作者：
Yanquan Geng;Yongda Yan;Xuesen Zhao;Z. Hu;Yingchun Liang;T. Sun;S. Dong
中科院分区：
文献类型：
--
作者：
Yanquan Geng;Yongda Yan;Xuesen Zhao;Z. Hu;Yingchun Liang;T. Sun;S. Dong
提出了一种利用原子力显微镜（AFM）在铝合金表面加工毫米尺度纳米通道的新方法。研究了加工速度、法向载荷和进给速度等加工参数对切屑形成机理和加工结果的影响。结果表明：较高的加工速度比较低的加工速度能获得更多、更长的连续带状切屑，这是由于较高的加工速度会产生更多的热量，从而导致被切削材料之间的附着力更大。由于不同的去除状态导致轻负荷与重载下的切屑状态存在显著差异。在该方法中，不同进料速率下的犁耕和切削状态在每次划痕中的百分比是关键，这对去除切屑状态和纳米通道的加工深度有重要影响。给出了深度、表面粗糙度与加工参数之间的关系。最后，成功地获得了毫米尺度的纳米通道阵列和三维阶梯型通道，表明该方法具有制造毫米尺度纳米通道的能力。
A novel nanomachining method based on the atomic force microscope (AFM) is presented to process millimeter scale nanochannels on the surface of the aluminum alloy. Effects of the machining parameters including the machining velocity, the normal load and the feed rate on chip formation mechanism and the machined results are investigated. Results show that more and longer continuous belt-type chips are achieved with a higher machining velocity than a lower one because the higher machining velocity will bring more heat which results in a larger adhesion force between removed materials. There is a significant difference of chip states between the light load and the heavy load which is induced by different removal states. The percentage of the ploughing and cutting states with different feed rates in each scratch plays the key role in this method which has a significant effect on the removal chip states as well as the machined depth of the nanochannels. Moreover, relationships between the depths and surface roughness and the machining parameters are provided. Finally, a nanochannels array and a 3D ladder-type channel with a millimeter scale are obtained successfully indicating the capability of fabrication of the millimeter scale nanochannels using this method.