Production of Microfabricated Surfaces and Their Effects on Cell Behavior
Production of Microfabricated Surfaces and Their Effects on Cell Behavior
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DOI：
10.1007/978-3-642-56486-4_11
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
N. Jaeger;D. Brunette
中科院分区：
文献类型：
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作者：
N. Jaeger;D. Brunette
微制造是一个通用的、包罗万象的术语，描述了用于制造集成电路和微机械的技术[1]。其包括用于将掺杂剂沉积或注入到衬底上或衬底中的技术、用于在衬底上生长外延层的技术、用于从衬底蚀刻材料的方法、用于氧化材料的方法、用于在另一材料上图案化一种材料的方法以及用于将掺杂剂扩散到材料中的方法。大多数微制造技术和工艺至少起源于最初为微电子工业开发的技术，参见例如[2]。然而，微制造不再是微电子工业的专利;它被用于光学领域，如集成光学和电子光子学，它被用于制造微传感器[3]，它被用于制造微机电系统，当然，它在生物科学中的应用越来越多。
Microfabrication is a general, catch-all term that describes the technologies that are used to manufacture integrated circuits and micromachines [1]. It includes techniques for depositing or implanting dopants onto or into substrates, techniques for growing epitaxial layers onto substrates, methods for etching materials off of substrates, methods for oxidizing materials, methods for patterning one material on another material, and methods for diffusing dopants into materials. Most microfabrication techniques and technologies have at least their roots in technologies originally developed for the microelectronics industry, see for example [2]. Microfabrication is no longer the preserve of the microelectronics industry however; it is used in areas of optics such as integrated-optics and electro-photonics, it is used in the fabrication of microsensors [3], it is used to fabricate micro-electromechanical systems, and, of course, it is finding increasing applications in the biological sciences.