NUMERICAL INVESTIGATION OF THE KINETICS AND CHEMISTRY OF RF GLOW-DISCHARGE PLASMAS SUSTAINED IN HE, N2, O2, HE/N2/O2, HE/CF4/O2, AND SIH4/NH3 USING A MONTE-CARLO-FLUID HYBRID MODEL
NUMERICAL INVESTIGATION OF THE KINETICS AND CHEMISTRY OF RF GLOW-DISCHARGE PLASMAS SUSTAINED IN HE, N2, O2, HE/N2/O2, HE/CF4/O2, AND SIH4/NH3 USING A MONTE-CARLO-FLUID HYBRID MODEL
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DOI：
10.1063/1.351196
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发表时间：
1992-02-15
影响因子：
3.2
通讯作者：
KUSHNER, MJ
中科院分区：
文献类型：
--
作者：
SOMMERER, TJ;KUSHNER, MJ
电容耦合射频 (rf) 辉光放电是等离子体辅助材料加工中的标准源。同时解决非平衡电子传输和等离子体化学的计算困难阻碍了射频放电的理论分析。我们开发了一种混合蒙特卡罗流体模拟，可以模拟非平衡电子传输，同时以流体模拟的速度执行。电子蒙特卡罗模拟 (EMCS) 用于计算电子能量分布 (EED) 作为射频周期中位置和相位的函数。碰撞率和传输系数根据 EED 计算得出，并用于带电粒子行为的自洽流体模型 (SCFM) 和中性化学/传输模型。来自 SCFM 的电场循环回到 EMCS，并且迭代该过程直到收敛。所有相关的重粒子（带电和中性）反应以及电子与离子的碰撞、激发态和反应产物都可以包括在内。该混合模型适用于材料加工感兴趣的各种气体混合物。
Capacitively coupled radio-frequency (rf) glow discharges are standard sources in plasma assisted materials processing. Theoretical analyses of rf discharges have been hampered by the computational difficulty of simultaneously resolving nonequilibrium electron transport and plasma chemistry. We have developed a hybrid Monte Carlo-fluid simulation that can simulate nonequilibrium electron transport while executing with the speed of a fluid simulation. An electron Monte Carlo simulation (EMCS) is used to calculate the electron energy distribution (EED) as a function of position and phase in the rf cycle. Collision rates and transport coefficients are calculated from the EED and used in a self-consistent fluid model (SCFM) of charged particle behavior and a neutral chemistry/transport model. Electric fields from the SCFM are cycled back to the EMCS, and the process is iterated until convergence. All pertinent heavy particle (charged and neutral) reactions can be included as well as collisions of electrons with ions, excited states, and reaction products. The hybrid model is applied to a variety of gas mixtures of interest to materials processing.