Resonance frequency-retuned quartz tuning fork as a force sensor for noncontact atomic force microscopy
Resonance frequency-retuned quartz tuning fork as a force sensor for noncontact atomic force microscopy
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DOI：
10.1063/1.4891882
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发表时间：
2014-07
影响因子：
4
通讯作者：
H. Ooe;T. Sakuishi;M. Nogami;M. Tomitori;T. Arai
中科院分区：
文献类型：
--
作者：
H. Ooe;T. Sakuishi;M. Nogami;M. Tomitori;T. Arai
基于双叉式石英音叉，研制了一种用于原子分辨率非接触原子力显微镜(NC-AFM)的高Q因子力传感器--回调叉式传感器。通过切割一个小缺口，并将AFM尖端连接到一个尖端，它的共振频率可以恢复到另一个完整的尖端。在以这种方式平衡两个支路时，传感器获得了高Q因数(在超高真空下为50 000)。用带有该传感器的NC-AFM演示了Si(111)-7×7表面的原子分辨率图像。针对不同的耗散通道，测量和分析了Q因子与传感器谐振频率和针尖与样品之间的长程力的关系。结果表明，信号检测电路中的损耗主要受NC-AFM系统总Q因子的限制。
Based on a two-prong type quartz tuning fork, a force sensor with a high Q factor, which we call a retuned fork sensor, was developed for non-contact atomic force microscopy (nc-AFM) with atomic resolution. By cutting a small notch and attaching an AFM tip to one prong, its resonance frequency can be retuned to that of the other intact prong. In balancing the two prongs in this manner, a high Q factor (>50 000 in ultrahigh vacuum) is obtained for the sensor. An atomic resolution image of the Si(111)-7 × 7 surface was demonstrated using an nc-AFM with the sensor. The dependence of the Q factor on resonance frequency of the sensor and the long-range force between tip and sample were measured and analyzed in view of the various dissipation channels. Dissipation in the signal detection circuit turned out to be mainly limited by the total Q factor of the nc-AFM system.