Effect of Delamination Strength on Wear Resistance of TiN Film Coated by Spttering and Gas Nitriding.
Effect of Delamination Strength on Wear Resistance of TiN Film Coated by Spttering and Gas Nitriding.
复制标题
分层强度对溅射和气体氮化TiN薄膜耐磨性的影响。
DOI：
10.1299/kikaia.67.1009
复制
发表时间：
2001
期刊：
影响因子：
--
通讯作者：
Ichishige Unoki
中科院分区：
文献类型：
--
作者：
Masahiko Kato;K. Nakasa;Xu Yan;Ichishige Unoki
采用反应射频磁控溅射和气体氮化两种方法在纯钛表面沉积TiN薄膜。采用销-盘磨损试验研究了TiN薄膜的界面强度对薄膜耐磨性的影响。结果表明，两种方法均能显著提高耐磨性，但在一定的旋转循环次数后，这种效果很快消失。在磨损试验过程中的磨损疤痕的光学观察表明，剥离的一小部分的膜发生和区域内的旋转周期的小幅度增加。当具有界面裂纹的涂层试样通过移动销的摩擦受到剪切载荷时，界面断裂韧性GC 1/2通过以下公式计算：GC 12 =（μ-μ12）2 P2 /8 E1（B1- hd）{R2 -（R-hd）2}其中P是销在分层时的法向载荷，R是销的曲率半径，B1和E1分别为薄膜的厚度和弹性常数，μ为销与薄膜间的摩擦系数，μ12为部分分层薄膜与基体间的摩擦系数，h为磨痕深度。GC 1/2随着旋转循环次数的增加而降低，这表明在磨损试验期间损伤累积引起的界面断裂韧性的劣化。
TiN films were deposited on pure titanium specimens by reactive RF magnetron sputtering and gas nitriding methods. Pin-on-disk type wear tests were carried out to evaluate the effect of interfacial strength on the wear resistance of TiN films. The results showed that the wear property was improved remarkably by both methods, but the effect quickly disappeared after a certain number of rotation cycles. Optical observation of wear scars during wear tests showed that delamination of a small part of the film occurred and the area extended within a small increase in rotation cycles. When a coated specimen with an interfacial crack receives shear load by the friction of moving pin, the interfacial fracture toughness, GC1/2, is calculated by the following equation : GC1/2= (μ-μ12)2 P2 /8 E1(B1- hd){R2 - (R-hd)2} where P is the normal load of the pin at delamination, R is radius of curvature of pin, B1 and E1 are thickness and elastic constant of the film, μ is the friction coefficient between pin and film, μ12 is that between partially delaminated film and substrate, and h is the depth of the wear scar. The GC1/2 decreased with increase in the number of rotation cycles, which indicated the degradation of the interfacial fracture toughness caused by damage accumulation during the wear test.