High frequency permeability of nanocrystalline Fe–Cu–Nb–Si–B single and multilayer films
High frequency permeability of nanocrystalline Fe–Cu–Nb–Si–B single and multilayer films
复制标题
纳米晶 Fe-Cu-Nb-Si-B 单层和多层薄膜的高频磁导率
DOI：
10.1063/1.350007
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发表时间：
1991
影响因子：
3.2
通讯作者：
H. Fujimori
中科院分区：
文献类型：
--
作者：
N. Kataoka;T. Shima;H. Fujimori
研究了射频溅射制备的 Fe-Cu-Nb-Si-B 合金单层和多层薄膜的结构和磁性能。 1μm厚的单层薄膜在溅射沉积状态下为非晶相，并结晶成主要是bcc相，具有纳米尺寸的细晶粒，与具有相同成分的熔融淬火带材一样。这些单膜的结晶行为和居里温度也与带材相似。晶化诱导bcc相具有1.3 T的高饱和磁化强度和良好的软磁性能。为了提高高频磁导率，人们尝试将 Fe-Cu-Nb-Si-B 合金与 SiO2 等非磁性材料多层化。研究发现，在 500°C 退火 1 h 的 Fe75.6Cu0.8Nb1.9Si13.2B8.5(500 nm)/SiO2(5 nm) 多层薄膜也由 bcc 细晶组成，在 1 MHz 下磁导率高达 7000，矫顽力约为 0.08 Oe。
Structure and magnetic properties of Fe–Cu–Nb–Si–B alloy single and multilayer films produced by rf sputtering have been investigated. The 1‐μm‐thick single films are of an amorphous phase in the as‐sputter‐deposited state and are crystallized into a mainly bcc phase with fine grains of nanometer size, as are melt‐quenched ribbons with the same composition. The crystallization behavior and the Curie temperature of these single films are also similar to those of the ribbons. The crystallization‐induced bcc phase possesses a high saturation magnetization of 1.3 T and good soft magnetic properties. For improving permeability at high frequency, an attempt has been made to multilayer the Fe–Cu–Nb–Si–B alloy with nonmagnetic materials such as SiO2. It has been found that Fe75.6Cu0.8Nb1.9Si13.2B8.5(500 nm)/SiO2(5 nm) multilayer films annealed at 500 °C for 1 h also consist of bcc fine crystallites and exhibit permeability as high as 7000 at 1 MHz and low coercivity of about 0.08 Oe.