First X-ray imaging with a micromachined Wolter type-I telescope
First X-ray imaging with a micromachined Wolter type-I telescope
复制标题
首次使用微机械 Wolter I 型望远镜进行 X 射线成像
DOI：
10.1007/s00542-016-2906-3
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
K. Nakajima
中科院分区：
文献类型：
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作者：
T. Ogawa;Y. Ezoe;T. Kakiuchi;M. Ikuta;M. Sato;K. Nakamura;M. Numazawa;K. Takeuchi;M. Terada;T. Ohashi;I. Mitsuishi;K. Ishikawa;K. Mitsuda;K. Morishita;K. Nakajima
利用微机械加工技术制作了用于未来空间X射线观测的轻型Wolter I型望远镜原型。采用深反应离子刻蚀技术制备了宽度为20 μ m的金刚石微孔。用高温退火使孔的侧壁平滑。然后，两个晶片变形到不同的曲率半径，1000和333毫米。这两个晶片使用平行的X射线束，这是占主导地位的Al-Kline在1.49千电子伏对齐。使用可移动的平台实现了角秒和m量级的高角度和位置精度。第一个清晰的X射线聚焦被证实。它的角分辨率在半高宽为4.1弧分，而在半功率宽至少为92弧分。有效面积为19.0 mm，比模型计算值小5倍。我们讨论了角分辨率和有效面积下降的原因，以及未来的改进。
A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers are aligned using parallel X-ray beams which are dominated by Al-Kline at 1.49 keV. High angular and positional accuracies of the order of arcsec andm are achieved using movable stages. The first clear X-ray focusing is confirmed. Its angular resolution is 4.1 arcmin in full width half maximum while it is at least 92 arcmin in half power width. The effective area is 19.0 mmwhich is5 times smaller than a model calculation. We discuss causes of the degraded angular resolution and effective area and also future improvements.