Fabrication of alumina/polyimide multi- layered material by sputtering and vapor deposition polymerization
Fabrication of alumina/polyimide multi- layered material by sputtering and vapor deposition polymerization
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DOI：
10.2109/jcersj.114.713
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发表时间：
2006
影响因子：
1.1
通讯作者：
T. Naganuma;H. Kakisawa;A. Dericioglu;Y. Kagawa
中科院分区：
文献类型：
--
作者：
T. Naganuma;H. Kakisawa;A. Dericioglu;Y. Kagawa
采用溅射和气相沉积聚合的方法制备了氧化铝/聚酰亚胺多层膜。在室温下将氧化铝层和聚酰亚胺前驱体聚酰胺酸层涂覆在Si衬底上。连续沉积和间断沉积制备了层状结构；前者是在真空下连续蒸发，而后者是在每次分层后暴露在空气中，在真空下形成下一层。交替沉积多达7层后，将层状复合材料加热至573 K 1 h以诱导热亚酰化。在不连续沉积过程中，层压板出现裂纹和分层现象。对于连续沉积，氧化铝/聚酰亚胺复合材料保持多层结构，无裂纹和脱层。
The alumina/polyimide multi-layers were fabricated by dry process using sputtering and vapor deposition polymerization. The alumina layer and polyamic acid layer as a polyimide precursor were coated on a Si substrate at room temperature. The layered structure was prepared under the continuous and discontinuous depositions; the former was to evaporate continuously under vacuum, while the latter was to expose in air after each layering process and to form the next layer under vacuum. After alternating depositions of up to 7 layers, the layered composites were heated to 573 K for 1 h to induce thermal imidization. Under the discontinuous deposition, cracks and delaminations occurred in the laminate. As for continuous deposition, the alumina/polyimide composite remained a multi-layered structure without cracks and delaminations.