Structural, mechanical and tribological properties of Mo-S-N solid lubricant films
Structural, mechanical and tribological properties of Mo-S-N solid lubricant films
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Mo-S-N固体润滑膜的结构、机械和摩擦学性能
DOI：
10.1016/j.surfcoat.2016.04.040
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发表时间：
2016
影响因子：
5.4
通讯作者：
Wang Peng
中科院分区：
文献类型：
--
作者：
Zhang Xiaolong;Qiao Li;Chai Liqiang;Xu Jiao;Shi Lei;Wang Peng
本文采用二硫化钼(MoS2)靶材在氮气和氩气气氛下磁控溅射合成Mo-S-N复合固体润滑膜。随着氮含量的增加，沉积薄膜中的氮浓度从0at.%增加到35at.%，相应的S/Mo原子比降低到0.70以下。 X射线衍射（XRD）和拉曼光谱分析表明，将氮引入薄膜中会导致非晶结构的形成，并且通过X射线光电子能谱检测到氮和钼之间的化学键。随着 N2 流量的增加（即 N 含量的增加），Mo-S-N 薄膜的硬度和弹性模量比纯 MoS2 薄膜增加一个数量级以上，分别达到最大值 9.59 和 113.12 GPa。在低压真空下通过球盘摩擦仪测试所制备的薄膜的摩擦学性能表明，适当含量的N掺杂剂的加入可以显着降低磨损率，但是超过一定量的N掺杂剂时，摩擦系数和磨损率都会急剧增加。
In this paper, the composite Mo-S-N solid lubricant films are synthesized by magnetron sputtering of molybdenum disulphide (MoS2) target in nitrogen and argon atmosphere. With the increase of the nitrogen content, the nitrogen concentration in the deposited films increases from 0 to 35 at.%, and the corresponding S/Mo atomic ratio reduces to below 0.70. X-ray diffraction (XRD) and Raman spectroscopy analyses reveal that introducing nitrogen into films leads to the formation of amorphous structure and chemical bonds between nitrogen and molybdenum were detected by X-ray photoelectron spectroscopy. The hardness and elastic modulus of Mo–S–N films increase more than one order of magnitude higher than that of pure MoS2films with increasing the N2flow rate (i.e., with increasing N content), reaching to the maximum of 9.59 and 113.12 GPa, respectively. The tribological properties of the prepared films tested by a ball-on-disc tribometer under a low-pressure vacuum exhibit that the incorporation of a suitable content of N dopant could significantly reduce the wear rate, however, both friction coefficient and wear rate increase dramatically in excess a certain amount of N dopant.