Current Detection SPR Sensor Device Using Au Grating and NIR Light
Current Detection SPR Sensor Device Using Au Grating and NIR Light
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使用金光栅和近红外光的电流检测 SPR 传感器装置
DOI：
10.1109/mems51670.2022.9699665
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
Shinichi Suzuki,Ryota Kuroki and Tetsuo Kan
中科院分区：
文献类型：
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作者：
Yang Jing、Sheng Guojun;et al.;Shinichi Suzuki,Ryota Kuroki and Tetsuo Kan
在本文中，我们提出了一个电流检测表面等离子体共振（SPR）传感器与不连续的Au光栅的硅纳米台阶。虽然垂直照射光栅型SPR传感器的背面以实现消除入射光与待测样品之间的相互作用的紧凑化学传感器是有效的，但迄今报道的光栅结构的光谱灵敏度不够尖锐。在这项研究中，我们发现，一个不连续的Au光栅上的硅纳米台阶显示出尖锐的光谱响应的近红外（NIR）光的背面垂直照射，并验证了这种结构的有效性，通过模拟和实际设备的测量。
In this paper, we propose a current-detecting surface plasmon resonance (SPR) sensor with a discontinuous Au grating on a Si nanostep. Although it is effective to illuminate vertically the backside of the grating-type SPR sensor to realize a compact chemical sensor that eliminates the interaction between the incident light and the sample under test, the spectral sensitivity of the grating structures reported so far is not sufficiently sharp. In this study, we found that a discontinuous Au grating on Si nanosteps shows sharp spectral response to a vertical illumination of near-infrared (NIR) light on the backside, and verified the effectiveness of this structure by simulations and actual device measurements.