A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements
A Heterodyne Interferometer with Separated Beam Paths for High-Precision Displacement and Angular Measurements
复制标题
DOI：
10.1007/s41871-021-00101-x
复制
发表时间：
2021-04
影响因子：
--
通讯作者：
G. Straube;Juan Sebastian Fischer Calderón;I. Ortlepp;R. Füßl;E. Manske
中科院分区：
文献类型：
--
作者：
G. Straube;Juan Sebastian Fischer Calderón;I. Ortlepp;R. Füßl;E. Manske
由于机器内精确定位的标准概念随着测量量的增加而达到极限，因此逆概念是解决此问题的有前途的方法。逆原理带来了其他限制，如在大测量体积内的传感器头的高精度定位，需要三个四光束干涉仪，以便测量传感器头的所有必要的平移和旋转，并重建参考系统的拓扑结构，该参考系统由x，y和z方向上的固定反射镜组成。本文介绍了一种被动外差式激光干涉仪的原理，它具有用于各个外差频率的分离光路。光束路径的设计进行了说明和描述，以及信号处理和评估算法的设计，这是使用集成的FPGA，CPU和A/D转换器的片上系统实现的。建立了一个流线型的台式光学组件，并进行了测量，以研究剩余的非线性。此外，使用商用零差干涉仪进行参考测量。
As standard concepts for precision positioning within a machine reach their limits with increasing measurement volumes, inverse concepts are a promising approach for addressing this problem. The inverse principle entails other limitations, as for high-precision positioning of a sensor head within a large measurement volume, three four-beam interferometers are required in order to measure all necessary translations and rotations of the sensor head and reconstruct the topography of the reference system consisting of fixed mirrors in thex-,y-, andz-directions. We present the principle of a passive heterodyne laser interferometer with consequently separated beam paths for the individual heterodyne frequencies. The beam path design is illustrated and described, as well as the design of the signal-processing and evaluation algorithm, which is implemented using a System-On-a-Chip with an integrated FPGA, CPU, and A/D converters. A streamlined bench-top optical assembly was set up and measurements were carried out to investigate the remaining non-linearities. Additionally, reference measurements with a commercial homodyne interferometer were executed.