On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate -: art. no. 072901
On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate -: art. no. 072901
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DOI：
10.1063/1.2007855
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发表时间：
2005-08-15
影响因子：
4
通讯作者：
Sada, C
中科院分区：
文献类型：
--
作者：
Bianconi, M;Argiolas, N;Sada, C
用卢瑟福背散射沟道技术研究了5 MeV氧离子注入同组分LiNbO_3的损伤。损伤增长的动力学由考虑了核能量和电子能量沉积的单独贡献的解析式描述。人们假设，核损害提供了释放到电子子系统的能量的局部化，这是将其转化为原子位移所必需的。用500keV的氧离子对样品进行预注入实验验证了解析公式所预见的预先存在的缺陷对损伤堆积的强烈影响。结果表明，随后的5 MeV氧离子注入步骤会引起令人印象深刻的损伤积累，最终导致表面的完全非晶化，即使在中等注量下也是如此。(C)2005年美国物理研究所。
The damage induced by 5 MeV oxygen ion implantation in x-cut congruent LiNbO3 has been investigated by Rutherford backscattering spectrometry channeling technique. The dynamics of the damage growth has been described by an analytical formula considering the separate contributions of nuclear and electronic energy deposition. It has been hypothesized that the nuclear damage provides the localization of the energy released to the electronic subsystem necessary for the conversion into atomic displacements. The strong influence of the preexisting defects on the damage pileup, foreseen by the analytical formula, has been experimentally verified by pre-implanting the samples with 500 keV oxygen ions. It has been shown that a subsequent 5 MeV oxygen implantation step gives rise to an impressive damage accumulation, eventually leading to the total amorphization of the surface, even at moderate fluences. (C) 2005 American Institute of Physics.