Control of surface particle density in pulsed laser deposition of superconducting YBa2Cu3O7 and diamondlike carbon thin films
Control of surface particle density in pulsed laser deposition of superconducting YBa2Cu3O7 and diamondlike carbon thin films
复制标题
脉冲激光沉积超导 YBa2Cu3O7 和类金刚石碳薄膜中表面颗粒密度的控制
DOI：
10.1063/1.107864
复制
发表时间：
1992
影响因子：
4
通讯作者：
J. Narayan
中科院分区：
文献类型：
--
作者：
R. Singh;D. Bhattacharya;J. Narayan
研究了靶材制备和修饰对脉冲激光沉积（PLD）薄膜颗粒密度的影响。采用独特工艺条件制备的YBa_2Cu_3O_7靶材，对PLD薄膜表面形貌的控制因素进行了实验研究。通过改变目标处理条件的性质，可以显著降低超导薄膜中的颗粒密度，并且完全消除类金刚石薄膜中的颗粒密度。冷压和烧结块体超导目标进行控制连续波（cw）CO2激光照射的压实和致密化的目标。采用的另一种方法是将银结合到超导体靶中以改善其热导率、光吸收系数和体积密度。发现连续CO_2激光处理YBa_2Cu_3O_7靶沉积的薄膜颗粒密度显著降低。实验结果表明，
We have investigated the effects of target preparation and modification in controlling the particle density of films fabricated by the pulsed laser deposition (PLD) technique. YBa2Cu3O7 targets, prepared by unique processing conditions, were used to experimentally study the factors controlling surface morphology of PLD films. By varying the nature of the target processing conditions, the particle density can be considerably reduced in superconducting thin films and completely eliminated in diamondlike carbon thin films. Cold pressed and sintered bulk superconducting targets were subjected to controlled continuous wave (cw) CO2 laser irradiation for compacting and densifying the target. Another method employed was the incorporation of silver into the superconductor targets to improve its thermal conductivity, optical absorption coefficient, and bulk density. The particle density was found to significantly reduce for films deposited from cw CO2 laser processed YBa2Cu3O7 targets. The experimental results wer...