Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition
Synthesis of Individually Tuned Nanomagnets for Nanomagnet Logic by Direct Write Focused Electron Beam Induced Deposition
复制标题
DOI：
10.1021/nn305079a
复制
发表时间：
2013-01-01
期刊：
影响因子：
17.1
通讯作者：
Bertagnolli, Emmerich
中科院分区：
文献类型：
--
作者：
Gavagnin, Marco;Wanzenboeck, Heinz D.;Bertagnolli, Emmerich
纳米磁逻辑（NML）是一种利用磁性纳米元件之间的相互作用来编码和计算二进制信息的未来逻辑新技术。这种方法通过大幅降低计算系统的功耗和提供非易失性，克服了基于CMOS的微电子技术的众所周知的限制。一个实际的关键挑战是这种系统的纳米制造，到目前为止，是通过平面技术中复杂的多步工艺制备的。在这里，我们报告的单步合成NML关键元素的聚焦电子束诱导沉积（FEBID）使用五羰基铁作为气体前体。所得的纳米磁体具有内部铁部分和3 nm氧化铁覆盖物（核-壳结构）。FEBID纳米线实现了传统NML门的全部功能。实现了一种基于弯曲纳米线的保持栅极功能的先进结构。通过直接写入获得的独特设计降低了错误概率，并且可以在未来的NML元件中合并多个NW。
Nanomagnet Logic (NML) Is a promising new technology for future logic which exploits interactions among magnetic nanoelements in order to encode and compute binary information. This approach overcomes the well-known limits of CMOS-based microelectronics by drastically reducing the power consumption of computational systems and by offering nonvolatility. An actual key challenge is the nanofabrication of such systems that, up to date, are prepared by complex multistep processes in planar technology. Here, we report the single-step synthesis of NML key elements by focused electron beam induced deposition (FEBID) using iron pentacarbonyl as a gas precursor. The resulting nanomagnets feature an inner iron part and a 3 nm Iron oxide cover (core-shell structure). Full functionality of conventional NML gates from FEBID-nanowires was achieved. An advanced structure maintaining the gate functionality based on bended nanowires was realized. The unique design obtained by direct-writing reduces the error probability and may merge several NWs in future NML elements.