CONTROLLED NUCLEATION AEROSOL REACTORS - PRODUCTION OF BULK SILICON
CONTROLLED NUCLEATION AEROSOL REACTORS - PRODUCTION OF BULK SILICON
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DOI：
10.1080/02786828608959090
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发表时间：
1986-01-01
影响因子：
5.2
通讯作者：
FLAGAN, RC
中科院分区：
文献类型：
--
作者：
ALAM, MK;FLAGAN, RC
介绍了一种新型气溶胶反应器。通过控制气相反应的速率，使得蒸气扩散到现有颗粒比均匀成核更有利，少量的晶种颗粒可以生长到超微米尺寸。生长颗粒对均匀成核速率的影响的模型已被用于设计用于通过硅烷气体的热分解生产硅颗粒的反应器。在此两级反应器中已生长出质量中值直径为9 μm的颗粒。硅气溶胶的产率范围从70%到83%已经实现了与此系统。
A new type of aerosol reactor is described. By controlling the rate of gas phase reactions such that vapor diffusion to existing particles is favored over homogeneous nucleation, a small number of seed particles can be grown to supermicron sizes. A model for the influence of growing particles on the rate of homogeneous nucleation has been used to design a reactor for the production of silicon particles by thermal decomposition of silane gas. Particles as large as 9 μm mass median diameter have been grown in this two-stage reactor. Silicon aerosol yields ranging from 70% to 83% have been achieved with this system.