Addressable microlens array for parallel laser microfabrication
Addressable microlens array for parallel laser microfabrication
复制标题
DOI：
10.1364/ol.36.002302
复制
发表时间：
2011-06-15
期刊：
影响因子：
3.6
通讯作者：
Booth, Martin J.
中科院分区：
文献类型：
--
作者：
Salter, Patrick S.;Booth, Martin J.
将微透镜阵列与液晶空间光调制器(SLM)相结合，实现了飞秒激光微细加工中的并行加工。SLM的一部分被映射到阵列中的每个单独的小透镜上，并且可以用于有效地打开和关闭焦点以用于制造。此外，该技术允许使焦点阵列的强度均匀，并相对于其自然焦点平移光斑。该技术展示了对非周期结构进行高效处理的潜力。(C)2011年美国光学学会
Parallel processing in femtosecond-laser-based microfabrication is demonstrated using a microlens array in conjunction with a liquid-crystal spatial light modulator (SLM). A portion of the SLM is mapped onto each individual lenslet in the array and can be used to effectively switch foci on and off for fabrication. In addition, the technique allows for homogenizing the intensity of the array of foci and translating spots relative to their natural focus. The technique demonstrates the potential for high efficiency processing of aperiodic structures. (c) 2011 Optical Society of America