Piezoelectric Vibratory-Cantilever Force Sensors and Axial Sensitivity Analysis for Individual Triaxial Tactile Sensing
Piezoelectric Vibratory-Cantilever Force Sensors and Axial Sensitivity Analysis for Individual Triaxial Tactile Sensing
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DOI：
10.1109/icsens.2011.6127030
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发表时间：
2011-10
影响因子：
4.3
通讯作者：
K. Yamashita;Yi Yang;T. Nishimoto;K. Furukawa;M. Noda
中科院分区：
文献类型：
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作者：
K. Yamashita;Yi Yang;T. Nishimoto;K. Furukawa;M. Noda
振动力传感器是利用压电电容器在微悬臂结构上制作的，通过单个传感器元件实现三轴灵敏度。通过控制多层结构的残余应力组合，使悬臂梁形成三维弯曲形状。在模拟人体皮肤结构的弹性体表面施加触觉载荷的情况下，分析了悬臂式传感器的三轴触觉灵敏度。悬臂梁由外部交流电压反向压电激励，并开发了三种谐振模式来检测单个传感器元件施加的负载矢量分量。研究了负载作用下各模态的谐振频移。结果表明，三个轴向触觉载荷的频率变化是独立的，它们可以叠加，对应于载荷分量的叠加。通过补偿传感器响应的非线性，利用单悬臂梁传感器的谐振频率来估计所施加的载荷矢量。对负载满量程±4kpa的估计误差小于1.1%。
Vibratory force sensors are fabricated using piezoelectric capacitors on microcantilever structures for triaxial sensitivity by the individual sensor element. The cantilevers have been formed into a 3-D curved shape by controlling residual stress combination of the multilayered structure. Triaxial tactile sensitivity of the cantilever sensor is analyzed under a tactile load application onto the surface of an elastomer in which the cantilever is embedded, mimicking human skin structure. The cantilever is converse-piezoelectrically excited by an external ac voltage and three resonant modes are developed to detect the applied load vector components by the single sensor element. Resonant frequency shifts of each mode are investigated upon load applications. The results show that the frequencies vary to the three axial tactile loads independently and they can be superposed with corresponding to the superposition of the load components. The applied load vectors are estimated by resonant frequencies of the single cantilever sensor with compensating nonlinearities of the sensor response. The estimated error is less than 1.1% to the full scale of the load ±4 kPa.